| Problem |
18 Dec |
K3 Sputterer AJA1 |
waiting for power supply parts -> Power supply is at vendor and we are still waiting for parts before it can be repaired and shipped back. will update when we have more information.
|
olms0025 |
| Problem |
3 Mar |
P2 Etcher Ion Mill Intlvac |
Waiting for new Cryo -> Cryo Temps on this tool are higher then normal but vacuum still looks great. Cryo temperature interlock setpoints changed from 15K and 18K to 28K and 35K while a new cryo is being sourced.
|
mikke168 |
| Problem |
10 Apr |
P3 PEALD Ultratech |
Users to check particle level before running your sample. |
whipp003 |
| Problem |
6 Dec |
K1 Oxidation Tube 14 Gate Oxide Tylan |
tycom central control console reliability pm -> doing biannual pm on Tycom CCC by disassembling and checking power supply voltages and cleaning PC board edge connections with contact cleaner as a reliability pm
|
broug001 |
| Problem |
28 Nov |
KA2 CVIV testing |
IV - Computer issues -> A replacement computer is being worked on. The CV and IV HP
systems can be used in manual mode. Without computer no data files
can be saved.
|
whipp003 |
| Problem |
14 Mar |
K1 ALD Savannah Ultratech |
Current Films update -> Precursors were rearragnged Al2O3, HfO2 and SnO are now available. Do not use SiO2.
|
jorex023 |
| Shutdown |
23 Apr |
P1 Ellipsometer Rudolph |
shutdown update -> "System was making random crackling sounds and found the laser was not on. Turned system power off using key on the side." This is still in queue, will probably not get to this for several weeks. If you need the tool urgently, contact Brian Olmsted
|
olms0025 |
| Shutdown |
16 Aug |
KA1 Si Nanowire Deposition |
exhaust off |
cibuzar |
| Shutdown |
4 Feb |
K1 Oxidation Tube 15 General Tylan |
Process person wants to do some content analysis test runs in the near future -> due to T15 having been used for special project use since 2020.
|
broug001 |
| Shutdown |
3 Oct |
K1 Oxidation Tube 14 Gate Oxide Tylan |
serioal io error and ot TC error and torch controller needs to heat -> no steam oxidations until torch temp exceeds 650C to satisfy H2 temp interlock
|
broug001 |
| Shutdown |
27 Nov |
K1 Ellipsometer Spectroscopic Woolam |
working through power supply issues -> replacement power supply not compatible with tool needs. Ordering new power supply.
|
olms0025 |
| Shutdown |
11 Mar |
K1 Wafer Bonder SB6 Karl Suss |
TOOL or pin Could not be moved down -> Needing this error resolved - checking of the parts and sensors to find the paroblem.
|
whipp003 |
| Shutdown |
12 Mar |
P5 Ebeam Spinner CEE2 |
Parts ordering -> Parts are orderd and on 6 to 8 wk back order.
|
mmargosi |
| Shutdown |
2 Apr |
P3 HD PCVD Plasmatherm |
chamber components are cleaned. needs re-assembly. -> We have a pump ready to go. Need to Tee this into exhaust facilities and then re-assemble chamber components. Will start working on this again soon, as other tasks are nearing completion.
|
olms0025 |
| Shutdown |
9 Apr |
PAN 185 Gas Sorption Analyzer |
Parts ordering -> ASCO has revised the ship to date to May 2nd.
|
mmargosi |
| Shutdown |
22 Apr |
K1 RTA Solaris 150 |
working with Shawn from SSI on solving water channel leaks -> involving process chilled water cooling channels etc
|
broug001 |
| Shutdown |
22 Apr |
K3 Evaporator Temescal |
facilities exhaust tee being made for vacuum pump exhaust -> so we can finish the cry regen, pump chamber to hivac and test gate valve, etc
|
broug001 |
| Shutdown |
22 Apr |
K3 Etcher XeF2 Xactix |
tool can be used. see shutodwn entry -> Tool is available for use but is shutdown to preserve pump life. If you need this tool, just email MNC staff and we'll have it up in 48 hours.
|
olms0025 |
| Shutdown |
22 Apr |
P1 UHV Deposition AJA |
baking out -> ebeam gun and sputter heads are tested and working. baking out and will release into service.
|
olms0025 |
| Shutdown |
23 Apr |
K3 Evaporator Varian |
installing simple viewport and mirrors like CHA has -> and since the llarge chamber ring has been removed the system needs checkout to insure that it will rotate fixtures properly and theat QCM location is adequate, and other items like trimming the extra wide bell jar MDC L-seal that was installed instead of an expensive CHA bell jar J-seal
|
broug001 |
| Shutdown |
28 Apr |
K3 Sputterer AJA1 |
AJA1 Computer Upgrade Install -> BW Systems will be coming in on wednesday the 30th at 8am to install the new system computer and test the system.
|
mikke168 |
| Shutdown |
29 Apr |
P2 Etcher Ion Mill Intlvac |
no plasma, possible cathode issue -> no plasma. usually when this happens there is an issue with the LFN aka electron shower cathode.
|
rober074 |