| Problem |
18 Dec |
K3 Sputterer AJA1 |
waiting for power supply parts -> Power supply is at vendor and we are still waiting for parts before it can be repaired and shipped back. will update when we have more information.
|
olms0025 |
| Problem |
8 May |
P5 Ebeam Litho EBPG5000+ Vistec |
use only 100 nA or lower beams -> column is out of alignment, so use only 100 nA or lower beams.
|
rober074 |
| Problem |
16 May |
PAN 185 Stabino Zeta Potential Analyzer |
Stabino II Requires Calibration and Diagnostics Testing -> All beaker and piston combinations require calibration and follow-up diagnostic testing to confirm accuracy and precision in its analysis of Zeta Potential for colloidal suspensions.
Beakers are labeled 1, 2, Micro.
Pistons are labeled 200 um, 400 um, and 1 mL
Calibrations required for each beaker and piston combo include:
Single Point Zeta Potential (Ludox TM-40 silica, -38 mV)
Multi-Point Zeta Potential (Ludox TM-40 silica, -38 mV)
Acid Base Titrations - pH meter (Triple point using buffers 4.0, 7.0, and 10.0)
Streaming Potential (P-DADMAC at 0.0025N)
Please note that this is a shared tool workstation with the Microtrac DLS Analyzer. Work should be scheduled around DLS tool appointments.
I will be able to perform these calibrations and diagnostic testing on Monday, May 19th at 9 am. Please allow up to 2-3 hours for completion.
Thanks,
- Matthew Johnson
NanoBio Lab Support Specialist
Minnesota Nano Center - PAN-140
115 Union Street SE
Minneapolis, MN 55455
joh14999 at umn.edu C: (612)306-2796
|
joh14999 |
| Problem |
19 May |
K1 AFM DI3000 |
needs replacement video monitor -> need vga monitor and cable if available for a successful start up
|
broug001 |
| Problem |
21 May |
K3 Etcher XeF2 Xactix |
tool is available -> Tool is available for use but is shutdown to preserve pump life. If you need this tool, just email MNC staff and we'll have it up in 48 hours.
|
olms0025 |
| Problem |
22 May |
P3 Wet Bench HF Process |
Beaker of BOE Sitting Out -> There has been a beaker of BOE sitting at this bench for many months that needs to be disposed of, as this feels rather unsafe. It seems that over the months it has also been filled up more so it is now close to full.
|
nilso037 |
| Problem |
23 May |
P3 Sputterer AJA2 |
G2 plasma doesn't turn on |
kim02384 |
| Problem |
23 May |
P3 Sputterer AJA2 |
Gun 2 seems to be shorted -> I took gold out of gun, looked for flakes, reassembled, but still seems shorted. Won't ight until problem is found.
|
rober074 |
| Problem |
6 Dec |
K1 Oxidation Tube 14 Gate Oxide Tylan |
tycom central control console reliability pm -> doing biannual pm on Tycom CCC by disassembling and checking power supply voltages and cleaning PC board edge connections with contact cleaner as a reliability pm
|
broug001 |
| Problem |
28 Nov |
KA2 CVIV testing |
IV - Computer issues -> A replacement computer is being worked on. The CV and IV HP
systems can be used in manual mode. Without computer no data files
can be saved.
|
whipp003 |
| Problem |
14 Mar |
K1 ALD Savannah Ultratech |
Current Films update -> Precursors were rearragnged Al2O3, HfO2 and SnO are now available. Do not use SiO2.
|
jorex023 |
| Shutdown |
23 Apr |
P1 Ellipsometer Rudolph |
shutdown update -> "System was making random crackling sounds and found the laser was not on. Turned system power off using key on the side." This is still in queue, will probably not get to this for several weeks. If you need the tool urgently, contact Brian Olmsted
|
olms0025 |
| Shutdown |
16 Aug |
KA1 Si Nanowire Deposition |
exhaust off |
cibuzar |
| Shutdown |
4 Feb |
K1 Oxidation Tube 15 General Tylan |
Process person wants to do some content analysis test runs in the near future -> due to T15 having been used for special project use since 2020.
|
broug001 |
| Shutdown |
3 Oct |
K1 Oxidation Tube 14 Gate Oxide Tylan |
serioal io error and ot TC error and torch controller needs to heat -> no steam oxidations until torch temp exceeds 650C to satisfy H2 temp interlock
|
broug001 |
| Shutdown |
2 Apr |
P3 HD PCVD Plasmatherm |
chamber components are cleaned. needs re-assembly. -> We have a pump ready to go. Need to Tee this into exhaust facilities and then re-assemble chamber components. Will start working on this again soon, as other tasks are nearing completion.
|
olms0025 |
| Shutdown |
30 Apr |
K1 Wafer Bonder SB6 Karl Suss |
had tool not moved error and will install the new air cylinders -> when time permits
|
broug001 |
| Shutdown |
14 May |
K1 RTA Solaris 150 |
sent back to mfgr -> The RTA was sent back to the manufacturer to repair a persistent problem. No return ETA yet, but they will start working on this tomorrow.
|
olms0025 |
| Shutdown |
21 May |
K1 Ellipsometer Spectroscopic Woolam |
new power supply arrived -> New power supply has arrived. needs to be installed.
|
olms0025 |
| Shutdown |
21 May |
K3 Evaporator Temescal |
base pressure was 3.4e-7 except at pocket 3 it hopped to 1e-4T -> RM and TB here assessing ebgun hearth alignment and replacing seals and precision aligning hearth before reassembly and loading a tooling factor Aluminum deposition test; We will check 0-10V output calibration 0 to 100 percent on dep controller before depositing
|
broug001 |
| Shutdown |
23 May |
P1 UHV Deposition AJA |
chamber pressure near -8T range needing bakeout -> Lamps are extended, both heater pads are installed. Chamber needs bakeout. single head qcm head is installed on qcm channel 1
|
broug001 |